Direct metal nano-patterning using embossed solid electrolyte

Anil Kumar, Keng Hsu, Kyle Jacobs, Placid Ferreira, Nicholas Fang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this letter we introduce a new approach to fabricating nano-scale metallic features by combining best merits of micro-forming, nanoimprint lithography, and electrochemical nanoimprinting. We study the mechanical properties of Ag2S, a solid-state superionic conductor previously reported by Hsu et al. [1] for electrochemical nanoimprinting (S4 process), and explore its capability for embossing using a Si mold fabricated using electron-beam lithography. By circumventing the traditional route of stamp preparation using Focused Ion Beam (FIB), we greatly enhance the capability of electrochemical nanoimprinting. Using an embossed stamp, we demonstrate features <10 nm; and patterns on areas >30 mm2. Application of an embossed Ag2S stamp is a significant step towards extending the S4 process for direct metal patterning of features beyond the capability of current processes.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages141-146
Number of pages6
Volume1156
StatePublished - 2009
Externally publishedYes
Event2009 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 13 2009Apr 17 2009

Other

Other2009 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/13/094/17/09

Fingerprint

Nanoimprint lithography
Electron beam lithography
Focused ion beams
Solid electrolytes
solid electrolytes
lithography
Metals
Mechanical properties
embossing
metals
conductors
ion beams
routes
mechanical properties
electron beams
solid state
preparation

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Kumar, A., Hsu, K., Jacobs, K., Ferreira, P., & Fang, N. (2009). Direct metal nano-patterning using embossed solid electrolyte. In Materials Research Society Symposium Proceedings (Vol. 1156, pp. 141-146)

Direct metal nano-patterning using embossed solid electrolyte. / Kumar, Anil; Hsu, Keng; Jacobs, Kyle; Ferreira, Placid; Fang, Nicholas.

Materials Research Society Symposium Proceedings. Vol. 1156 2009. p. 141-146.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kumar, A, Hsu, K, Jacobs, K, Ferreira, P & Fang, N 2009, Direct metal nano-patterning using embossed solid electrolyte. in Materials Research Society Symposium Proceedings. vol. 1156, pp. 141-146, 2009 MRS Spring Meeting, San Francisco, CA, United States, 4/13/09.
Kumar A, Hsu K, Jacobs K, Ferreira P, Fang N. Direct metal nano-patterning using embossed solid electrolyte. In Materials Research Society Symposium Proceedings. Vol. 1156. 2009. p. 141-146
Kumar, Anil ; Hsu, Keng ; Jacobs, Kyle ; Ferreira, Placid ; Fang, Nicholas. / Direct metal nano-patterning using embossed solid electrolyte. Materials Research Society Symposium Proceedings. Vol. 1156 2009. pp. 141-146
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