Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays

Shawn M. O'Rourke; Douglas E. Loy; Curt Moyer; Edward J. Bawolek; Scott K. Ageno; Barry P. O'Brien; Michael Marrs; Dirk Bottesch; Jeff Dailey; Rob Naujokaitis; Jann P. Kaminski; David Allee; Sameer M. Venugopal; Jesmin Haq; Nicholas Colaneri; Gregory Raupp

Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays

Shawn M. O'Rourke, Douglas E. Loy, Curt Moyer, Edward J. Bawolek, Scott K. Ageno, Barry P. O'Brien, Michael Marrs, Dirk Bottesch, Jeff Dailey, Rob Naujokaitis, Jann P. Kaminski, David Allee, Sameer M. Venugopal, Jesmin Haq, Nicholas Colaneri, Gregory Raupp

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper we describe solutions to address critical challenges in direct fabrication of amorphous silicon thin film transistor (TFTs) arrays for active matrix flexible displays. For all flexible substrates a manufacturable handling protocol in automated display-scale equipment is required. For metal foil substrates the principal challenges are planarization and electrical isolation, and management of stress (CTE mismatch) during TFT fabrication. For plastic substrates the principal challenge is dimensional instability management.

Original language	English (US)
Title of host publication	SID Conference Record of the International Display Research Conference
Pages	122-125
Number of pages	4
State	Published - 2008
Event	28th International Display Research Conference, IDRC'08 - Orlando, FL, United States Duration: Nov 4 2008 → Nov 6 2008

Other

Other	28th International Display Research Conference, IDRC'08
Country/Territory	United States
City	Orlando, FL
Period	11/4/08 → 11/6/08

Keywords

Electrophoretic displays
Manufacturing processes
Metal foil
Pilot line
Plastic
Reflective flexible displays

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

O'Rourke, S. M., Loy, D. E., Moyer, C., Bawolek, E. J., Ageno, S. K., O'Brien, B. P., Marrs, M., Bottesch, D., Dailey, J., Naujokaitis, R., Kaminski, J. P., Allee, D., Venugopal, S. M., Haq, J., Colaneri, N., & Raupp, G. (2008). Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays. In SID Conference Record of the International Display Research Conference (pp. 122-125)

Direct fabrication of a-Si : H thin film transistor arrays on flexible substrates for low power flexible displays. / O'Rourke, Shawn M.; Loy, Douglas E.; Moyer, Curt; Bawolek, Edward J.; Ageno, Scott K.; O'Brien, Barry P.; Marrs, Michael; Bottesch, Dirk; Dailey, Jeff; Naujokaitis, Rob; Kaminski, Jann P.; Allee, David; Venugopal, Sameer M.; Haq, Jesmin; Colaneri, Nicholas; Raupp, Gregory.

SID Conference Record of the International Display Research Conference. 2008. p. 122-125.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

O'Rourke, SM, Loy, DE, Moyer, C, Bawolek, EJ, Ageno, SK, O'Brien, BP, Marrs, M, Bottesch, D, Dailey, J, Naujokaitis, R, Kaminski, JP, Allee, D, Venugopal, SM, Haq, J, Colaneri, N & Raupp, G 2008, Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays. in SID Conference Record of the International Display Research Conference. pp. 122-125, 28th International Display Research Conference, IDRC'08, Orlando, FL, United States, 11/4/08.

O'Rourke, Shawn M. ; Loy, Douglas E. ; Moyer, Curt ; Bawolek, Edward J. ; Ageno, Scott K. ; O'Brien, Barry P. ; Marrs, Michael ; Bottesch, Dirk ; Dailey, Jeff ; Naujokaitis, Rob ; Kaminski, Jann P. ; Allee, David ; Venugopal, Sameer M. ; Haq, Jesmin ; Colaneri, Nicholas ; Raupp, Gregory. / Direct fabrication of a-Si : H thin film transistor arrays on flexible substrates for low power flexible displays. SID Conference Record of the International Display Research Conference. 2008. pp. 122-125

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title = "Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays",

abstract = "In this paper we describe solutions to address critical challenges in direct fabrication of amorphous silicon thin film transistor (TFTs) arrays for active matrix flexible displays. For all flexible substrates a manufacturable handling protocol in automated display-scale equipment is required. For metal foil substrates the principal challenges are planarization and electrical isolation, and management of stress (CTE mismatch) during TFT fabrication. For plastic substrates the principal challenge is dimensional instability management.",

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AU - O'Rourke, Shawn M.

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AU - Ageno, Scott K.

AU - O'Brien, Barry P.

AU - Marrs, Michael

AU - Bottesch, Dirk

AU - Dailey, Jeff

AU - Naujokaitis, Rob

AU - Kaminski, Jann P.

AU - Allee, David

AU - Venugopal, Sameer M.

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AU - Colaneri, Nicholas

AU - Raupp, Gregory

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AB - In this paper we describe solutions to address critical challenges in direct fabrication of amorphous silicon thin film transistor (TFTs) arrays for active matrix flexible displays. For all flexible substrates a manufacturable handling protocol in automated display-scale equipment is required. For metal foil substrates the principal challenges are planarization and electrical isolation, and management of stress (CTE mismatch) during TFT fabrication. For plastic substrates the principal challenge is dimensional instability management.

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KW - Manufacturing processes

KW - Metal foil

KW - Pilot line

KW - Plastic

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Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays

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Keywords

ASJC Scopus subject areas

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