Direct fabrication of a-Si: H thin film transistor arrays on flexible substrates for low power flexible displays

Shawn M. O'Rourke, Douglas E. Loy, Curt Moyer, Edward J. Bawolek, Scott K. Ageno, Barry P. O'Brien, Michael Marrs, Dirk Bottesch, Jeff Dailey, Rob Naujokaitis, Jann P. Kaminski, David Allee, Sameer M. Venugopal, Jesmin Haq, Nicholas Colaneri, Gregory Raupp

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper we describe solutions to address critical challenges in direct fabrication of amorphous silicon thin film transistor (TFTs) arrays for active matrix flexible displays. For all flexible substrates a manufacturable handling protocol in automated display-scale equipment is required. For metal foil substrates the principal challenges are planarization and electrical isolation, and management of stress (CTE mismatch) during TFT fabrication. For plastic substrates the principal challenge is dimensional instability management.

Original languageEnglish (US)
Title of host publicationSID Conference Record of the International Display Research Conference
Pages122-125
Number of pages4
StatePublished - 2008
Event28th International Display Research Conference, IDRC'08 - Orlando, FL, United States
Duration: Nov 4 2008Nov 6 2008

Other

Other28th International Display Research Conference, IDRC'08
Country/TerritoryUnited States
CityOrlando, FL
Period11/4/0811/6/08

Keywords

  • Electrophoretic displays
  • Manufacturing processes
  • Metal foil
  • Pilot line
  • Plastic
  • Reflective flexible displays

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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