DIFFUSION ANALYSIS USING SECONDARY ION MASS SPECTROSCOPY (SIMS).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

An introductory presentation is made on the applications of secondary ion mass spectrometry to diffusion analysis in solids. The emphasis of discussion is to present an overview of the operational principles of SIMS and the types of diffusion experiments that can be analyzed as assessed from current practice. This includes a review of problems related to quantitation and standardization of composition and distance.

Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
EditorsG.E. Murch, H.K. Birnbaum, J.R. Cost
Place of PublicationWarrendale, PA, USA
PublisherMetallurgical Soc of AIME
Pages179-202
Number of pages24
StatePublished - 1984

ASJC Scopus subject areas

  • Engineering(all)

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