Development of Cu plating for silicon heterojunction solar cells

Antony Aguilar, Stanislau Herasimenka, Joseph Karas, Harsh Jain, Jongwon Lee, Krystal Munoz, Lynne Michaelson, Tom Tyson, William J. Dauksher, Stuart Bowden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the results of the study comparing various patterning and plating methods for the deposition of Cu electrodes on transparent conductive oxides for silicon heterojunction solar cells. We compared direct electroplating of Cu on different metal seeds (Ag, Ni, Cr and Ti deposited on transparent conductive oxide by physical vapor deposition) to the light induced plating of Ni/Cu directly on transparent conductive oxide. Patterning was done either using photoresists (formed by spin-on, screen printing or lamination) or lift-off of the PECVD dielectric using screen printed resist. The geometry of the fingers, line resistance, contact resistance and adhesion were used as comparative parameters. We identified direct electroplating of Cu on the sputtered Ag seed to achieve the lowest contact resistance and the best adhesion. All photoresists were able to achieve less than 60 micron resolution and could produce the fingers with the sought height (some, however, having a characteristic mushroom shape). The best silicon heterojunction cell with Cu contacts directly electroplated on the sputtered Ag seed achieved 21.9% efficiency on 153 cm2 area.

Original languageEnglish (US)
Title of host publication2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781509056057
DOIs
StatePublished - May 25 2018
Event44th IEEE Photovoltaic Specialist Conference, PVSC 2017 - Washington, United States
Duration: Jun 25 2017Jun 30 2017

Other

Other44th IEEE Photovoltaic Specialist Conference, PVSC 2017
CountryUnited States
CityWashington
Period6/25/176/30/17

Fingerprint

Silicon
Plating
Oxides
Seed
Heterojunctions
Solar cells
Electroplating
Photoresists
Contact resistance
Adhesion
Screen printing
Physical vapor deposition
Plasma enhanced chemical vapor deposition
Metals
Electrodes
Geometry

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Aguilar, A., Herasimenka, S., Karas, J., Jain, H., Lee, J., Munoz, K., ... Bowden, S. (2018). Development of Cu plating for silicon heterojunction solar cells. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017 (pp. 1-4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2017.8366440

Development of Cu plating for silicon heterojunction solar cells. / Aguilar, Antony; Herasimenka, Stanislau; Karas, Joseph; Jain, Harsh; Lee, Jongwon; Munoz, Krystal; Michaelson, Lynne; Tyson, Tom; Dauksher, William J.; Bowden, Stuart.

2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-4.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aguilar, A, Herasimenka, S, Karas, J, Jain, H, Lee, J, Munoz, K, Michaelson, L, Tyson, T, Dauksher, WJ & Bowden, S 2018, Development of Cu plating for silicon heterojunction solar cells. in 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 44th IEEE Photovoltaic Specialist Conference, PVSC 2017, Washington, United States, 6/25/17. https://doi.org/10.1109/PVSC.2017.8366440
Aguilar A, Herasimenka S, Karas J, Jain H, Lee J, Munoz K et al. Development of Cu plating for silicon heterojunction solar cells. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-4 https://doi.org/10.1109/PVSC.2017.8366440
Aguilar, Antony ; Herasimenka, Stanislau ; Karas, Joseph ; Jain, Harsh ; Lee, Jongwon ; Munoz, Krystal ; Michaelson, Lynne ; Tyson, Tom ; Dauksher, William J. ; Bowden, Stuart. / Development of Cu plating for silicon heterojunction solar cells. 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-4
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