Abstract
The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-ngstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2-15 |
| Number of pages | 14 |
| Journal | Microscopy and Microanalysis |
| Volume | 14 |
| Issue number | 1 |
| DOIs | |
| State | Published - Feb 2008 |
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Keywords
- Aberration correction
- Focal-series reconstruction
- Off-axis electron holography
ASJC Scopus subject areas
- Instrumentation
Cite this
Development of aberration-corrected electron microscopy. / Smith, David.
In: Microscopy and Microanalysis, Vol. 14, No. 1, 02.2008, p. 2-15.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Development of aberration-corrected electron microscopy
AU - Smith, David
PY - 2008/2
Y1 - 2008/2
N2 - The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-ngstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.
AB - The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-ngstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.
KW - Aberration correction
KW - Focal-series reconstruction
KW - Off-axis electron holography
UR - http://www.scopus.com/inward/record.url?scp=38349105035&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38349105035&partnerID=8YFLogxK
U2 - 10.1017/S1431927608080124
DO - 10.1017/S1431927608080124
M3 - Article
C2 - 18171498
AN - SCOPUS:38349105035
VL - 14
SP - 2
EP - 15
JO - Microscopy and Microanalysis
JF - Microscopy and Microanalysis
SN - 1431-9276
IS - 1
ER -