Development of aberration-corrected electron microscopy

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-ngstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.

Original languageEnglish (US)
Pages (from-to)2-15
Number of pages14
JournalMicroscopy and Microanalysis
Volume14
Issue number1
DOIs
StatePublished - Feb 2008

Fingerprint

Aberrations
Electron microscopy
aberration
electron microscopy
hardware
Electron holography
Hardware
holography
attachment
Lenses
Microscopes
microscopes
lenses
Transmission electron microscopy
computer programs
Scanning
transmission electron microscopy
scanning
Processing
electrons

Keywords

  • Aberration correction
  • Focal-series reconstruction
  • Off-axis electron holography

ASJC Scopus subject areas

  • Instrumentation

Cite this

Development of aberration-corrected electron microscopy. / Smith, David.

In: Microscopy and Microanalysis, Vol. 14, No. 1, 02.2008, p. 2-15.

Research output: Contribution to journalArticle

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