Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration

Hai Huang, Bryce Carande, Rui Tang, Jon Oiler, Zaitsev Dmitriy, Agafonov Vadim, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Scopus citations

Abstract

Molecular Electronic Transducer (MET) is a recent technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. MET is an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, lack of fragile moving parts and independence on the direction of sensitivity axis. This paper reports an approach to build a micro MET seismometer using Micro-Electro-Mechanical Systems (MEMS) techniques. We have reduced the MET cell size, resulting in internal dimensions close to 1 micrometer (μm). The employment of MEMS improves the sensitivity up to 400V (m/s2) and reproducibility of the device, and has reached 1 micro Gee (1.0 ×10-5 m/s2/√Hz) noise level at 1 Hz.

Original languageEnglish (US)
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages629-632
Number of pages4
DOIs
StatePublished - Apr 2 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: Jan 20 2013Jan 24 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period1/20/131/24/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Huang, H., Carande, B., Tang, R., Oiler, J., Dmitriy, Z., Vadim, A., & Yu, H. (2013). Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 629-632). [6474320] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474320