Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration

Hai Huang; Bryce Carande; Rui Tang; Jon Oiler; Zaitsev Dmitriy; Agafonov Vadim; Hongyu Yu

doi:10.1109/MEMSYS.2013.6474320

Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration

Hai Huang, Bryce Carande, Rui Tang, Jon Oiler, Zaitsev Dmitriy, Agafonov Vadim, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

22 Scopus citations

Abstract

Molecular Electronic Transducer (MET) is a recent technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. MET is an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, lack of fragile moving parts and independence on the direction of sensitivity axis. This paper reports an approach to build a micro MET seismometer using Micro-Electro-Mechanical Systems (MEMS) techniques. We have reduced the MET cell size, resulting in internal dimensions close to 1 micrometer (μm). The employment of MEMS improves the sensitivity up to 400V (m/s²) and reproducibility of the device, and has reached 1 micro Gee (1.0 ×10^-5 m/s²/√Hz) noise level at 1 Hz.

Original language	English (US)
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	629-632
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474320
State	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: Jan 20 2013 → Jan 24 2013

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	1/20/13 → 1/24/13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2013.6474320

Cite this

Huang, H., Carande, B., Tang, R., Oiler, J., Dmitriy, Z., Vadim, A., & Yu, H. (2013). Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 629-632). Article 6474320 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474320

Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration. / Huang, Hai; Carande, Bryce; Tang, Rui et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 629-632 6474320 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Huang, H, Carande, B, Tang, R, Oiler, J, Dmitriy, Z, Vadim, A & Yu, H 2013, Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474320, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 629-632, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 1/20/13. https://doi.org/10.1109/MEMSYS.2013.6474320

Huang H, Carande B, Tang R, Oiler J, Dmitriy Z, Vadim A et al. Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 629-632. 6474320. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474320

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abstract = "Molecular Electronic Transducer (MET) is a recent technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. MET is an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, lack of fragile moving parts and independence on the direction of sensitivity axis. This paper reports an approach to build a micro MET seismometer using Micro-Electro-Mechanical Systems (MEMS) techniques. We have reduced the MET cell size, resulting in internal dimensions close to 1 micrometer (μm). The employment of MEMS improves the sensitivity up to 400V (m/s2) and reproducibility of the device, and has reached 1 micro Gee (1.0 ×10-5 m/s2/√Hz) noise level at 1 Hz.",

author = "Hai Huang and Bryce Carande and Rui Tang and Jon Oiler and Zaitsev Dmitriy and Agafonov Vadim and Hongyu Yu",

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Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration

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