The electronic band structure of a modulation-doped AlGaNAlNGaN superlattice structure where the AlGaN layer is compositionally graded has been experimentally determined by electron holography. It is shown that all periods in the superlattice have a similar two-dimensional-electron-gas distribution, indicating no degradation in the quality of the heterostructures during growth. High-resolution potential energy profiles show that the nominally linear grading of the AlGaN barrier layers results in a parabolic profile in Al composition. Knowledge of the nature of energy barriers for electron transfer between channels is important in the optimization of the perpendicular conductivity of AlGaNGaN superlattice structures.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)