The elemental composition of a pseudomorphic GaN/In xGa 1-xN/GaN quantum-well structure was determined using convergent-beam electron diffraction (CBED). Areas of triangles, which were formed due to the intersection of higher-order Laue-zone (HOLZ) lines, were highly sensitive to lattice-parameter variations. The local In concentration was determined to be within ±0.5% by calculating the ratio of triangle areas. The results show that the HOLZ-line visibility can be improved by cooling the sample to lower temperature.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)