Designing a field service system for semiconductor manufacturing systems for remote diagnostics era

Cem Vardar, John Fowler, Esma Gel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With the advances in information technologies, service activities for expensive equipment used in semiconductor manufacturing can be performed from a remote location. This technology is called remote diagnostics (RD). In this study we develop a queueing-location model to analyze the capacity and location problem of after sales service providers considering the effects of RD technology. We also present a case study from semiconductor industry.

Original languageEnglish (US)
Title of host publicationIIE Annual Conference and Exhibition 2004
Pages1977-1982
Number of pages6
StatePublished - 2004
EventIIE Annual Conference and Exhibition 2004 - Houston, TX, United States
Duration: May 15 2004May 19 2004

Other

OtherIIE Annual Conference and Exhibition 2004
CountryUnited States
CityHouston, TX
Period5/15/045/19/04

ASJC Scopus subject areas

  • Engineering(all)

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