Design for facilities - Thoughts on interfacing process equipment and facility systems

Allan D. Chasey

Research output: Contribution to journalArticle

Abstract

When designing semiconductor manufacturing equipment to meet the highly complex challenges of today's semiconductor market, the focus historically has been on the process capability of the tool. The capital cost of the equipment, as well as the cost for operation and maintenance, is generally factored into the initial process equipment design scope; however, the impact of the equipment on facility costs are usually not included. The requirements of the production equipment drive facility design and facility costs represent a significant portion of the wafer cost. This paper explores how semiconductor manufacturing equipment can be designed to be more compatible with the facility and the infrastructure support systems. This paper will also look at some previously ignored semiconductor manufacturing equipment requirements which ultimately impacted a facility and drove additional facility costs.

Original languageEnglish (US)
JournalSESHA Journal: Semiconductor Environmental Safety and Health Association
Volume506
StatePublished - Mar 2006

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costs
cost
Semiconductor materials
Costs
manufacturing
requirements
support systems
maintenance
infrastructure
wafers
market
semiconductor

Keywords

  • Fabrication
  • Process equipment
  • Production equipment
  • Semiconductor facility
  • Tool design
  • Tool Installation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Environmental Science(all)

Cite this

@article{a8327cc32c624b6b9382b49d5161acce,
title = "Design for facilities - Thoughts on interfacing process equipment and facility systems",
abstract = "When designing semiconductor manufacturing equipment to meet the highly complex challenges of today's semiconductor market, the focus historically has been on the process capability of the tool. The capital cost of the equipment, as well as the cost for operation and maintenance, is generally factored into the initial process equipment design scope; however, the impact of the equipment on facility costs are usually not included. The requirements of the production equipment drive facility design and facility costs represent a significant portion of the wafer cost. This paper explores how semiconductor manufacturing equipment can be designed to be more compatible with the facility and the infrastructure support systems. This paper will also look at some previously ignored semiconductor manufacturing equipment requirements which ultimately impacted a facility and drove additional facility costs.",
keywords = "Fabrication, Process equipment, Production equipment, Semiconductor facility, Tool design, Tool Installation",
author = "Chasey, {Allan D.}",
year = "2006",
month = "3",
language = "English (US)",
volume = "506",
journal = "SESHA Journal: Semiconductor Environmental Safety and Health Association",
issn = "1537-4467",
publisher = "Semiconductor Environmental Safety Health Association",

}

TY - JOUR

T1 - Design for facilities - Thoughts on interfacing process equipment and facility systems

AU - Chasey, Allan D.

PY - 2006/3

Y1 - 2006/3

N2 - When designing semiconductor manufacturing equipment to meet the highly complex challenges of today's semiconductor market, the focus historically has been on the process capability of the tool. The capital cost of the equipment, as well as the cost for operation and maintenance, is generally factored into the initial process equipment design scope; however, the impact of the equipment on facility costs are usually not included. The requirements of the production equipment drive facility design and facility costs represent a significant portion of the wafer cost. This paper explores how semiconductor manufacturing equipment can be designed to be more compatible with the facility and the infrastructure support systems. This paper will also look at some previously ignored semiconductor manufacturing equipment requirements which ultimately impacted a facility and drove additional facility costs.

AB - When designing semiconductor manufacturing equipment to meet the highly complex challenges of today's semiconductor market, the focus historically has been on the process capability of the tool. The capital cost of the equipment, as well as the cost for operation and maintenance, is generally factored into the initial process equipment design scope; however, the impact of the equipment on facility costs are usually not included. The requirements of the production equipment drive facility design and facility costs represent a significant portion of the wafer cost. This paper explores how semiconductor manufacturing equipment can be designed to be more compatible with the facility and the infrastructure support systems. This paper will also look at some previously ignored semiconductor manufacturing equipment requirements which ultimately impacted a facility and drove additional facility costs.

KW - Fabrication

KW - Process equipment

KW - Production equipment

KW - Semiconductor facility

KW - Tool design

KW - Tool Installation

UR - http://www.scopus.com/inward/record.url?scp=80052216640&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052216640&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:80052216640

VL - 506

JO - SESHA Journal: Semiconductor Environmental Safety and Health Association

JF - SESHA Journal: Semiconductor Environmental Safety and Health Association

SN - 1537-4467

ER -