Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging

H. Oulachgar, P. Mauskopf, M. Bolduc, S. Ilias, J. E. Paultre, D. D'Amato, M. Terroux, T. Pope, C. Alain, P. Topart, H. Jerominek

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

A THz frequency selective microbolometer focal plane array (FPA) with 35 μm pixel pitch and a resolution of 384×288 pixels was recently developed at INO. The FPA was fabricated on a CMOS readout circuit using MEMS surface micromachining techniques. The uncooled microbolometer detectors, based on vanadium oxide technology, were optimized for detection at 4.25 THz. A high performance frequency selective THz camera operating at 4.25 THz was also demonstrated.

Original languageEnglish (US)
Title of host publication2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2013
DOIs
StatePublished - Dec 1 2013
Externally publishedYes
Event2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2013 - Mainz, Germany
Duration: Sep 1 2013Sep 6 2013

Publication series

NameInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
ISSN (Print)2162-2027
ISSN (Electronic)2162-2035

Other

Other2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2013
CountryGermany
CityMainz
Period9/1/139/6/13

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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    Oulachgar, H., Mauskopf, P., Bolduc, M., Ilias, S., Paultre, J. E., D'Amato, D., Terroux, M., Pope, T., Alain, C., Topart, P., & Jerominek, H. (2013). Design and microfabrication of frequency selective uncooled microbolometer focal plane array for terahertz imaging. In 2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2013 [6665501] (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz). https://doi.org/10.1109/IRMMW-THz.2013.6665501