@article{e7ef3ea1f0a04043aed686cdf8df3db2,
title = "Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)",
abstract = "We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.",
keywords = "Electrostatic actuator, MEMS actuator, Ultrasonic actuator",
author = "S. Kim and X. Zhang and R. Daugherty and E. Lee and G. Kunnen and David Allee and E. Forsythe and Junseok Chae",
note = "Funding Information: The authors thank CSSER (Center for Solid-State Electronics Research) staff at Arizona State University. This work was supported by Army Research Laboratory under Cooperative Agreement W911NG-04-2-0005. Funding Information: David R. Allee (BS in electrical engineering, University of Cincinnati, 1984; MS and PhD in electrical engineering, Stanford University, 1986 and 1990 respectively, post-doctoral fellow at Cambridge University, 1990–1991) is a professor of electrical engineering at Arizona State University. David is currently eirector of Research for Backplane Electronics for the Flexible Display Center (flexdisplay.asu.edu) funded by the Army, and he is investigating a variety of flexible electronics applications. He has been a regular consultant with several semiconductor industries on low voltage, low power mixed signal CMOS circuit design. He has co-authored over 100 archival scientific publications and U.S. patents. Publisher Copyright: {\textcopyright} 2012 Elsevier B.V. All rights reserved. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.",
year = "2013",
month = jun,
day = "1",
doi = "10.1016/j.sna.2012.10.010",
language = "English (US)",
volume = "195",
pages = "198--205",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
}