Abstract

We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.

Original languageEnglish (US)
Pages (from-to)198-205
Number of pages8
JournalSensors and Actuators, A: Physical
Volume195
DOIs
StatePublished - Jun 1 2013

Fingerprint

Polyethylene
Polyethylenes
polyethylenes
Electrostatics
Actuators
ultrasonics
actuators
Ultrasonics
Acoustic waves
diaphragms
electrostatics
sound pressure
Diaphragms
Substrates
Electrostatic actuators
Flexible displays
voltage controlled oscillators
acoustics
Ultrasonic waves
Variable frequency oscillators

Keywords

  • Electrostatic actuator
  • MEMS actuator
  • Ultrasonic actuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate). / Kim, S.; Zhang, X.; Daugherty, R.; Lee, E.; Kunnen, G.; Allee, David; Forsythe, E.; Chae, Junseok.

In: Sensors and Actuators, A: Physical, Vol. 195, 01.06.2013, p. 198-205.

Research output: Contribution to journalArticle

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AU - Kunnen, G.

AU - Allee, David

AU - Forsythe, E.

AU - Chae, Junseok

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