Abstract
We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 198-205 |
| Number of pages | 8 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 195 |
| DOIs | |
| State | Published - Jun 1 2013 |
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Keywords
- Electrostatic actuator
- MEMS actuator
- Ultrasonic actuator
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
Cite this
Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate). / Kim, S.; Zhang, X.; Daugherty, R.; Lee, E.; Kunnen, G.; Allee, David; Forsythe, E.; Chae, Junseok.
In: Sensors and Actuators, A: Physical, Vol. 195, 01.06.2013, p. 198-205.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)
AU - Kim, S.
AU - Zhang, X.
AU - Daugherty, R.
AU - Lee, E.
AU - Kunnen, G.
AU - Allee, David
AU - Forsythe, E.
AU - Chae, Junseok
PY - 2013/6/1
Y1 - 2013/6/1
N2 - We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.
AB - We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.
KW - Electrostatic actuator
KW - MEMS actuator
KW - Ultrasonic actuator
UR - http://www.scopus.com/inward/record.url?scp=85027925555&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85027925555&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2012.10.010
DO - 10.1016/j.sna.2012.10.010
M3 - Article
AN - SCOPUS:85027925555
VL - 195
SP - 198
EP - 205
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
ER -