Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)

S. Kim, X. Zhang, R. Daugherty, E. Lee, G. Kunnen, David Allee, E. Forsythe, Junseok Chae

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.

Original languageEnglish (US)
Pages (from-to)198-205
Number of pages8
JournalSensors and Actuators, A: Physical
Volume195
DOIs
StatePublished - Jun 1 2013

Keywords

  • Electrostatic actuator
  • MEMS actuator
  • Ultrasonic actuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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