Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)

S. Kim; X. Zhang; R. Daugherty; E. Lee; G. Kunnen; David Allee; E. Forsythe; Junseok Chae

doi:10.1016/j.sna.2012.10.010

Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate)

S. Kim, X. Zhang, R. Daugherty, E. Lee, G. Kunnen, David Allee, E. Forsythe, Junseok Chae

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.

Original language	English (US)
Pages (from-to)	198-205
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	195
DOIs	https://doi.org/10.1016/j.sna.2012.10.010
State	Published - Jun 1 2013

Keywords

Electrostatic actuator
MEMS actuator
Ultrasonic actuator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2012.10.010

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Design and implementation of electrostatic micro-actuators in ultrasonic frequency on a flexible substrate, PEN (polyethylene naphthalate). / Kim, S.; Zhang, X.; Daugherty, R.; Lee, E.; Kunnen, G.; Allee, David; Forsythe, E.; Chae, Junseok.

In: Sensors and Actuators, A: Physical, Vol. 195, 01.06.2013, p. 198-205.

Research output: Contribution to journal › Article › peer-review

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abstract = "We present an electrostatic actuator fabricated on a flexible polyethylene naphthalate (PEN) substrate, which emits acoustic waves at ultrasonic frequencies. The MEMS actuator has a suspended parylene diaphragm which consists of 2-6 mm diameter and 6 μm gap between the diaphragm and substrate. Driving circuitry consists of voltage controlled oscillator (VCO) and output buffer chain, and was fabricated by Arizona State University's Flexible Display Center-IC process. The fabricated actuator emits ultrasonic waves at 25 kHz, and acoustic sound pressure of 27 dB SPL (sound pressure level) driven by the hydrogenated amorphous silicon (a-Si:H) circuitry.",

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note = "Funding Information: The authors thank CSSER (Center for Solid-State Electronics Research) staff at Arizona State University. This work was supported by Army Research Laboratory under Cooperative Agreement W911NG-04-2-0005. ",

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AU - Daugherty, R.

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AU - Kunnen, G.

AU - Allee, David

AU - Forsythe, E.

AU - Chae, Junseok

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