Design and fabrication of unsteady electrokinetic microactuator arrays for turbulent boundary layer control

Francisco J. Diez, Werner J.A. Dahm

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

A micro-electro-kinetic actuator (MEKA) array for the control of the viscous sublayer of a turbulent boundary layer is developed. Several generations of MEKA arrays are fabricated that explore the use of non-conventional MEMS materials such as quartz, polymers or mylar and are combined where needed with conventional MEMS design and fabrication process. The potential advantages of using the electrokinetic principle as the basis for a new class of microscale actuators suitable for active sublayer control are also discussed. It is found that the actuators have no moving parts and they achieve the flow rates required for this type of flow control.

Original languageEnglish (US)
Pages (from-to)1307-1320
Number of pages14
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number10
DOIs
StatePublished - Oct 1 2004

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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