Design and Fabrication of Curved Micromirrors Using the Multipoly Process

Bin Mi, Harold Kahn, Frank Merat, Arthur H. Heuer, David A. Smith, Stephen Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents the design and fabrication of reflective curved micromirrors with pre-determined static shapes. The fabrication of these devices uses conventional surface micromachining technology and the MultiPoly process [1], which is a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The inexpensive fabrication of these micromirrors allows for a range of designs that could address many applications, including optical switches.

Original languageEnglish (US)
Title of host publicationProceedings of IEEE Sensors
Pages42-45
Number of pages4
Volume2
Edition1
StatePublished - 2003
Externally publishedYes
EventSecond International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada
Duration: Oct 22 2003Oct 24 2003

Other

OtherSecond International Conference on Sensors: IEEE Sensors 2003
CountryCanada
CityToronto, Ont.
Period10/22/0310/24/03

Fingerprint

Fabrication
Surface micromachining
Optical switches
Polysilicon
Multilayers

Keywords

  • Adaptive Optics
  • MEMS
  • Micromirrors
  • MultiPoly
  • Stress Gradient

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Mi, B., Kahn, H., Merat, F., Heuer, A. H., Smith, D. A., & Phillips, S. (2003). Design and Fabrication of Curved Micromirrors Using the Multipoly Process. In Proceedings of IEEE Sensors (1 ed., Vol. 2, pp. 42-45)

Design and Fabrication of Curved Micromirrors Using the Multipoly Process. / Mi, Bin; Kahn, Harold; Merat, Frank; Heuer, Arthur H.; Smith, David A.; Phillips, Stephen.

Proceedings of IEEE Sensors. Vol. 2 1. ed. 2003. p. 42-45.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mi, B, Kahn, H, Merat, F, Heuer, AH, Smith, DA & Phillips, S 2003, Design and Fabrication of Curved Micromirrors Using the Multipoly Process. in Proceedings of IEEE Sensors. 1 edn, vol. 2, pp. 42-45, Second International Conference on Sensors: IEEE Sensors 2003, Toronto, Ont., Canada, 10/22/03.
Mi B, Kahn H, Merat F, Heuer AH, Smith DA, Phillips S. Design and Fabrication of Curved Micromirrors Using the Multipoly Process. In Proceedings of IEEE Sensors. 1 ed. Vol. 2. 2003. p. 42-45
Mi, Bin ; Kahn, Harold ; Merat, Frank ; Heuer, Arthur H. ; Smith, David A. ; Phillips, Stephen. / Design and Fabrication of Curved Micromirrors Using the Multipoly Process. Proceedings of IEEE Sensors. Vol. 2 1. ed. 2003. pp. 42-45
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