Abstract
This paper presents the design and fabrication of reflective curved micromirrors with pre-determined static shapes. The fabrication of these devices uses conventional surface micromachining technology and the MultiPoly process [1], which is a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The inexpensive fabrication of these micromirrors allows for a range of designs that could address many applications, including optical switches.
Original language | English (US) |
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Title of host publication | Proceedings of IEEE Sensors |
Pages | 42-45 |
Number of pages | 4 |
Volume | 2 |
Edition | 1 |
State | Published - 2003 |
Externally published | Yes |
Event | Second International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada Duration: Oct 22 2003 → Oct 24 2003 |
Other
Other | Second International Conference on Sensors: IEEE Sensors 2003 |
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Country/Territory | Canada |
City | Toronto, Ont. |
Period | 10/22/03 → 10/24/03 |
Keywords
- Adaptive Optics
- MEMS
- Micromirrors
- MultiPoly
- Stress Gradient
ASJC Scopus subject areas
- Engineering (miscellaneous)
- Electrical and Electronic Engineering