Dependence of the C49-C54 TiSi₂ phase transition temperature on film thickness and Si substrate orientation

Engineering & Materials Science

• Superconducting transition temperature 97%
• Film thickness 97%
• Phase transitions 93%
• Silicides 82%
• Surface morphology 67%
• Substrates 63%
• Titanium 57%
• Thick films 36%
• Free energy 35%
• Transmission electron microscopy 30%
• X ray diffraction 29%
• Temperature 24%
• Scanning electron microscopy 23%

Physics & Astronomy

• film thickness 73%
• transition temperature 71%
• silicides 62%
• titanium 49%
• wafers 45%
• thick films 28%
• free energy 24%
• transmission electron microscopy 19%
• scanning electron microscopy 19%
• temperature 17%
• diffraction 16%
• x rays 13%

Chemical Compounds

• Phase Transition Temperature 100%
• Liquid Film 43%
• Surface 14%
• Gibbs Free Energy 11%
• Transmission Electron Microscopy 9%
• Scanning Electron Microscopy 8%
• Volume 8%
• X-Ray Diffraction 7%