Demonstration of low loss β -Ga2O3 optical waveguides in the UV-NIR spectra

Jingan Zhou, Hong Chen, Houqiang Fu, Kai Fu, Xuguang Deng, Xuanqi Huang, Tsung Han Yang, Jossue A. Montes, Chen Yang, Xin Qi, Baoshun Zhang, Xiaodong Zhang, Yuji Zhao

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Abstract

In this paper, we report the fabrication of low loss beta-phase gallium oxide (β-Ga2O3) optical waveguides and the propagation loss analysis of the waveguides in the ultraviolet (UV) to near infrared (NIR) spectral region. The β-Ga2O3 thin films were grown on sapphire substrates using metal organic chemical vapor deposition and were fabricated into various waveguide structures using nanofabrication processes. A low propagation loss of 3.7 dB/cm was obtained on the β-Ga2O3 waveguide at the wavelength of 810 nm, which is comparable to the state of the art. Combined with theoretical simulations, various loss mechanisms from two-photon absorption, sidewall scattering, top surface scattering, and bulk scattering were discussed for β-Ga2O3 waveguides, and their contributions to the total optical loss were estimated. These results show that β-Ga2O3 is a promising optical material for the fabrication of various integrated photonic devices in the UV-NIR spectra region.

Original languageEnglish (US)
Article number251108
JournalApplied Physics Letters
Volume115
Issue number25
DOIs
StatePublished - Dec 16 2019
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Zhou, J., Chen, H., Fu, H., Fu, K., Deng, X., Huang, X., Yang, T. H., Montes, J. A., Yang, C., Qi, X., Zhang, B., Zhang, X., & Zhao, Y. (2019). Demonstration of low loss β -Ga2O3 optical waveguides in the UV-NIR spectra. Applied Physics Letters, 115(25), [251108]. https://doi.org/10.1063/1.5133845