Defects in single-crystal silicon induced by hydrogenation

Physics & Astronomy

• hydrogenation 100%
• single crystals 56%
• defects 50%
• silicon 48%
• spectroscopy 47%
• activation energy 33%
• photoluminescence 31%
• hydrogen 27%
• microcracks 25%
• platelets 24%
• Schottky diodes 23%
• radiation damage 23%
• secondary ion mass spectrometry 23%
• electron emission 22%
• low concentrations 21%
• deuterium 21%
• surface layers 19%
• Raman spectroscopy 19%
• damage 16%
• transmission electron microscopy 14%
• electronics 11%