Damage recovery and dopant diffusion in Si and Sn ion implanted β-Ga2O3

Marko J. Tadjer, Chaker Fares, Nadeemullah A. Mahadik, Jaime A. Freitas, David Smith, Ribhu Sharma, Mark E. Law, Fan Ren, S. J. Pearton, A. Kuramata

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Engineering & Materials Science

Chemical Compounds