CVD Synthesis and Gas Permeation Properties of Thin Palladium/Alumina Membranes

George Xomeritakis, Yue Sheng Lin

Research output: Contribution to journalArticle

97 Scopus citations

Abstract

Thin (0.5-5-μm) palladium (Pd) membranes were prepared inside pores or on the surface of mesoporous (pore size 4-6 nm), sol-gel-derived γ-Al2O3 supports by the chemical vapor deposition (CVD) method using palladium acetylacetonate and palladium chloride (together with hydrogen) as Pd precursors. When Pd is deposited in the form of metal plugs inside pores of γ-Al2O3, He permeance of the composite membranes increases exponentially with temperature, indicating activated diffusion through the microporous metal deposit defects, while only modest permselectivity for H2 is observed. When Pd is deposited in the form of a metal film on the surface of γ-Al2O3, He permeance is governed by Knudsen-viscous flow through meso/macroporous metal film defects. The H2 permeance of different palladium membranes prepared by CVD appears to increase with palladium crystal grain size. The highest H2 permeance and H2:He permselectivity for membranes prepared in this study are about 1.0-2.0 × 10-7 mol · m-2 · s-1 · Pa-1 and 200 - 300 at 300°C, respectively.

Original languageEnglish (US)
Pages (from-to)174-183
Number of pages10
JournalAIChE Journal
Volume44
Issue number1
DOIs
StatePublished - Jan 1998

ASJC Scopus subject areas

  • Biotechnology
  • Environmental Engineering
  • Chemical Engineering(all)

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