CVD modification and vapor/gas separation properties of nanoporous alumina membranes

M. Pan, C. Cooper, Jerry Lin, G. Y. Meng

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

A sol-gel derived 4nm pore γ-Al2O3 layer, supported on a macroporous α-Al2O3 support, was modified by chemical vapor deposition (CVD), with alternative introduction of trimethylaluminum and water vapor into the reaction chamber. Aluminum oxide was deposited in the pores of the γ-Al2O3 membrane layer. The modification resulted in a substantial reduction in the permeance of non-condensable gases, but not of condensable vapor. Separation of the mixture of condensable vapor (water) and non-condensable gas (oxygen) was performed on the unmodified and modified membranes at room temperature. The CVD modified membrane exhibits a water/oxygen separation factor as high as 71 at 12% relative humidity with water vapor permeance of 6.9x10-7mol/m2sPa. In comparison, the maximum separation factor for the unmodified membranes was about 11 at 80% relative humidity with a water vapor permeance of 2.9x10-7mol/m2sPa. Copyright (C) 1999 Elsevier Science B.V.

Original languageEnglish (US)
Pages (from-to)235-241
Number of pages7
JournalJournal of Membrane Science
Volume158
Issue number1-2
DOIs
StatePublished - Jun 1 1999
Externally publishedYes

Fingerprint

Aluminum Oxide
Steam
Water vapor
water vapor
Chemical vapor deposition
Alumina
aluminum oxides
Gases
Vapors
noncondensable gases
vapor deposition
vapors
membranes
Membranes
Humidity
gases
humidity
Atmospheric humidity
Oxygen
porosity

Keywords

  • Composite membranes
  • CVD
  • Gas separations
  • Microporous and porous membranes
  • Vapor separations

ASJC Scopus subject areas

  • Filtration and Separation
  • Polymers and Plastics

Cite this

CVD modification and vapor/gas separation properties of nanoporous alumina membranes. / Pan, M.; Cooper, C.; Lin, Jerry; Meng, G. Y.

In: Journal of Membrane Science, Vol. 158, No. 1-2, 01.06.1999, p. 235-241.

Research output: Contribution to journalArticle

Pan, M. ; Cooper, C. ; Lin, Jerry ; Meng, G. Y. / CVD modification and vapor/gas separation properties of nanoporous alumina membranes. In: Journal of Membrane Science. 1999 ; Vol. 158, No. 1-2. pp. 235-241.
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