CVD diamond - Research, applications, and challenges

Robert Nemanich, John A. Carlisle, Atsushi Hirata, Ken Haenen

Research output: Contribution to journalArticle

52 Citations (Scopus)

Abstract

Diamond is a unique material that often exhibits extreme properties compared to other materials. Discovered about 30 years ago, the use of hydrogen in plasma-enhanced chemical vapor deposition (CVD) has enabled the growth and coating of diamond in film form on various substrate materials. CVD diamond research has been actively continued subsequently to develop new understanding and approaches for the growth and processing of this fascinating material. Currently, the study and development of diamond films has enabled a wide range of applications based on the combination of unique and extreme properties of diamond and the variety of film properties obtainable through tuning the microstructure, morphology, impurities, and surfaces. This issue of MRS Bulletin introduces the latest research, recent applications, and the challenges ahead for CVD diamond films.

Original languageEnglish (US)
Pages (from-to)490-494
Number of pages5
JournalMRS Bulletin
Volume39
Issue number6
DOIs
StatePublished - 2014

Fingerprint

Diamond
Chemical vapor deposition
Diamonds
diamonds
vapor deposition
Diamond films
diamond films
Plasma enhanced chemical vapor deposition
Hydrogen
Tuning
tuning
Impurities
coatings
Coatings
impurities
microstructure
Microstructure
Substrates
hydrogen
Processing

Keywords

  • Biomedical
  • Chemical vapor deposition (CVD)
  • Diamond
  • Electronic material microelectromechanical (MEMS)
  • Plasma-enhanced CVD (PECVD) (deposition)

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

CVD diamond - Research, applications, and challenges. / Nemanich, Robert; Carlisle, John A.; Hirata, Atsushi; Haenen, Ken.

In: MRS Bulletin, Vol. 39, No. 6, 2014, p. 490-494.

Research output: Contribution to journalArticle

Nemanich, R, Carlisle, JA, Hirata, A & Haenen, K 2014, 'CVD diamond - Research, applications, and challenges', MRS Bulletin, vol. 39, no. 6, pp. 490-494. https://doi.org/10.1557/mrs.2014.97
Nemanich, Robert ; Carlisle, John A. ; Hirata, Atsushi ; Haenen, Ken. / CVD diamond - Research, applications, and challenges. In: MRS Bulletin. 2014 ; Vol. 39, No. 6. pp. 490-494.
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