A major requirement of the secondary ion mass spectrometry (SIMS) technique is a universal procedure for preparing standards by introducing controlled amounts of any desired element into any substrate. Ion implantation ideally fills this role. Conversely, a major requirement for ion implantation research is a universal analytical technique capable of characterizing the in-depth distribution of implanted species at concentrations of ~ 1 ppm and below. This requirement is being increasingly satisfied by secondary ion mass spectrometry. This review will illustrate the complementary nature of these two techniques with examples from current research.
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Nuclear Energy and Engineering
- Electrical and Electronic Engineering