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Crystalline SrZrO3 deposition on Ge (001) by atomic layer deposition for high-k dielectric applications
Shen Hu, Li Ji, Pei Yu Chen, Bryce I. Edmondson, Heng Lu Chang, Agham Posadas, Hsin Wei Wu, Edward T. Yu, David Smith, Alexander A. Demkov, John G. Ekerdt
Research output: Contribution to journal › Article › peer-review
9
Scopus
citations