Crystal structure and composition of BAlN thin films: Effect of boron concentration in the gas flow

Shuo Wang, Xiaohang Li, Alec M. Fischer, Theeradetch Detchprohm, Russell D. Dupuis, Fernando Ponce

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Fingerprint

Dive into the research topics of 'Crystal structure and composition of BAlN thin films: Effect of boron concentration in the gas flow'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds