Crystal orientation dependence of the electrical transport and lattice structure of zinc selenide films grown by metalorganic chemical vapor deposition

W. Stutius, F. A. Ponce

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Abstract

ZnSe films have been grown on 〈100〉, 〈110〉, and 〈111〉B GaAs surfaces, using the metalorganic chemical vapor deposition technique. The electrical transport properties and lattice structure characteristics of these films have been studied using a van der Pauw technique and high-resolution transmission electron microscopy. The electrical and structural properties of these films vary significantly with growth direction. In (100) layers, the observed defects are similar in nature to isolated compensated centers. For other orientations, observed properties are best described in terms of extended defects and grain boundaries.

Original languageEnglish (US)
Pages (from-to)1548-1553
Number of pages6
JournalJournal of Applied Physics
Volume58
Issue number4
DOIs
StatePublished - Dec 1 1985

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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