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Dive into the research topics of 'Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors'. Together they form a unique fingerprint.
Mathematics
Multilayer
Damage
Irradiation
Testing
Lifetime
Water Vapor
Reflectivity
Filament
Carbon
Concurrent
Dose
Water
Gas
Background
Experiment
Partial
Relationships
Chemical Compounds
Multilayers
Irradiation
Testing
Environmental chambers
Steam
Synchrotrons
Vapor pressure
Partial pressure
Carbon
Oxidation
Gases
Durability
Water
Chemical analysis
Experiments
Engineering & Materials Science
Multilayers
Irradiation
Testing
Synchrotrons
Vapor pressure
Partial pressure
Water vapor
Durability
Carbon
Chemical analysis
Gases
Water
Experiments
Physics & Astronomy
damage
mirrors
test chambers
life (durability)
irradiation
gas composition
endurance
vapor pressure
water vapor
partial pressure
synchrotrons
filaments
chambers
oxidation
reflectance
carbon
dosage
water