CORRELATED ELECTRICAL AND MICROSTRUCTURAL STUDIES OF RECRYSTALLIZED SILICON THIN FILMS ON BULK GLASS SUBSTRATES.

D. K. Biegelsen, N. M. Johnson, R. J. Nemanich, M. D. Moyer, L. E. Fennell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
Pages331-336
Number of pages6
StatePublished - Dec 1 1982
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume4
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Biegelsen, D. K., Johnson, N. M., Nemanich, R. J., Moyer, M. D., & Fennell, L. E. (1982). CORRELATED ELECTRICAL AND MICROSTRUCTURAL STUDIES OF RECRYSTALLIZED SILICON THIN FILMS ON BULK GLASS SUBSTRATES. In Materials Research Society Symposia Proceedings (pp. 331-336). (Materials Research Society Symposia Proceedings; Vol. 4).