Control of multiproduct bulk server diffusion/oxidation processes. Part 2: Multiple servers

John Fowler, Gary L. Hogg, Don T. Phillips

Research output: Contribution to journalArticle

Abstract

We investigate how knowledge of future arrivals can be used to control bulk server diffusion and oxidation processes in semiconductor manufacturing to reduce the average waiting time of lots. While past research has dealt with the control of bulk server queueing systems, only a few studies have addressed the use of knowledge of future arrivals, and those studies were limited to a single server system. We extend prior strategies for the single product-single server case to a multiple product-multiple server case, and devise a control strategy that is tested through the use of simulation. The performance of the new policy is compared to that of the optimal control strategy ignoring future arrivals (i.e., a Minimum Batch Size strategy). Results indicate that the new strategy performs well under a wide variety of circumstances. To demonstrate the control strategy performance in a realistic setting, a detailed simulation model of the diffusion area of an existing wafer fab was developed. The model was run with several start rates and the results compared to those from a Minimum Batch Size strategy. Results indicate that the new strategy performs well over a wide range of start rates.

Original languageEnglish (US)
Pages (from-to)167-176
Number of pages10
JournalIIE Transactions (Institute of Industrial Engineers)
Volume32
Issue number2
DOIs
StatePublished - 2000

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Servers
Oxidation
Semiconductor materials

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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Control of multiproduct bulk server diffusion/oxidation processes. Part 2 : Multiple servers. / Fowler, John; Hogg, Gary L.; Phillips, Don T.

In: IIE Transactions (Institute of Industrial Engineers), Vol. 32, No. 2, 2000, p. 167-176.

Research output: Contribution to journalArticle

@article{914d9b85b3c84004accfde1e964b4a4d,
title = "Control of multiproduct bulk server diffusion/oxidation processes. Part 2: Multiple servers",
abstract = "We investigate how knowledge of future arrivals can be used to control bulk server diffusion and oxidation processes in semiconductor manufacturing to reduce the average waiting time of lots. While past research has dealt with the control of bulk server queueing systems, only a few studies have addressed the use of knowledge of future arrivals, and those studies were limited to a single server system. We extend prior strategies for the single product-single server case to a multiple product-multiple server case, and devise a control strategy that is tested through the use of simulation. The performance of the new policy is compared to that of the optimal control strategy ignoring future arrivals (i.e., a Minimum Batch Size strategy). Results indicate that the new strategy performs well under a wide variety of circumstances. To demonstrate the control strategy performance in a realistic setting, a detailed simulation model of the diffusion area of an existing wafer fab was developed. The model was run with several start rates and the results compared to those from a Minimum Batch Size strategy. Results indicate that the new strategy performs well over a wide range of start rates.",
author = "John Fowler and Hogg, {Gary L.} and Phillips, {Don T.}",
year = "2000",
doi = "10.1080/07408170008963889",
language = "English (US)",
volume = "32",
pages = "167--176",
journal = "IISE Transactions",
issn = "2472-5854",
publisher = "Taylor and Francis Ltd.",
number = "2",

}

TY - JOUR

T1 - Control of multiproduct bulk server diffusion/oxidation processes. Part 2

T2 - Multiple servers

AU - Fowler, John

AU - Hogg, Gary L.

AU - Phillips, Don T.

PY - 2000

Y1 - 2000

N2 - We investigate how knowledge of future arrivals can be used to control bulk server diffusion and oxidation processes in semiconductor manufacturing to reduce the average waiting time of lots. While past research has dealt with the control of bulk server queueing systems, only a few studies have addressed the use of knowledge of future arrivals, and those studies were limited to a single server system. We extend prior strategies for the single product-single server case to a multiple product-multiple server case, and devise a control strategy that is tested through the use of simulation. The performance of the new policy is compared to that of the optimal control strategy ignoring future arrivals (i.e., a Minimum Batch Size strategy). Results indicate that the new strategy performs well under a wide variety of circumstances. To demonstrate the control strategy performance in a realistic setting, a detailed simulation model of the diffusion area of an existing wafer fab was developed. The model was run with several start rates and the results compared to those from a Minimum Batch Size strategy. Results indicate that the new strategy performs well over a wide range of start rates.

AB - We investigate how knowledge of future arrivals can be used to control bulk server diffusion and oxidation processes in semiconductor manufacturing to reduce the average waiting time of lots. While past research has dealt with the control of bulk server queueing systems, only a few studies have addressed the use of knowledge of future arrivals, and those studies were limited to a single server system. We extend prior strategies for the single product-single server case to a multiple product-multiple server case, and devise a control strategy that is tested through the use of simulation. The performance of the new policy is compared to that of the optimal control strategy ignoring future arrivals (i.e., a Minimum Batch Size strategy). Results indicate that the new strategy performs well under a wide variety of circumstances. To demonstrate the control strategy performance in a realistic setting, a detailed simulation model of the diffusion area of an existing wafer fab was developed. The model was run with several start rates and the results compared to those from a Minimum Batch Size strategy. Results indicate that the new strategy performs well over a wide range of start rates.

UR - http://www.scopus.com/inward/record.url?scp=85023851289&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85023851289&partnerID=8YFLogxK

U2 - 10.1080/07408170008963889

DO - 10.1080/07408170008963889

M3 - Article

AN - SCOPUS:85023851289

VL - 32

SP - 167

EP - 176

JO - IISE Transactions

JF - IISE Transactions

SN - 2472-5854

IS - 2

ER -