Contact resistance of silicon-polysilicon interconnection for different current-flow geometries

A. J. Walton, R. Holwill, J. M. Robertson

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

The relationship between contact window dimensions, specific contact resistivity pc and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ρc starts to become the dominant factor giving contact resistances independent of the direction of current flow.

Original languageEnglish (US)
Pages (from-to)13-14
Number of pages2
JournalElectronics Letters
Volume21
Issue number1
DOIs
StatePublished - Jan 3 1985

Keywords

  • Contact resistance
  • Integrated circuits

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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