Abstract
This paper presents a method for creating planar, fluidic devices by bonding together laminations created with the nickel electroforming method. The fluid amplifier (throat width=.002″[50.8 microns], aspect ratio=1, operated in the laminar region using oxygen at 10 psig [69 KPa]) is created by sandwiching together several, several .001″ [25.4 microns] thick laminations. These laminations contain the fluid amplifier, vents and transfer channels. The laminations are initially coated with an adhesive, which acts as a bonding agent when subjected to heat. Special pins are used to insure proper alignment. The entire process is performed in a clean room environment to minimize problems. The proportional fluid amplifier is made bistable by introducing positive feedback.
Original language | English (US) |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
Editors | C H Mastrangelo, H Becker |
Pages | 28-38 |
Number of pages | 11 |
Volume | 4560 |
DOIs | |
State | Published - 2001 |
Event | Microfluidics and BioMEMS - San Francisco, CA, United States Duration: Oct 22 2001 → Oct 24 2001 |
Other
Other | Microfluidics and BioMEMS |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 10/22/01 → 10/24/01 |
Keywords
- Fluid amplifier
- Fluidics
- Laminar operation
- Microfluidics
- Nickel electroforming
- Oxygen therapy
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics