@article{a0e8bd6dfb5c42d4bf1b33fb9986ea84,
title = "Constructing oxide interfaces and heterostructures by atomic layer-by-layer laser molecular beam epitaxy",
abstract = "Advancements in nanoscale engineering of oxide interfaces and heterostructures have led to discoveries of emergent phenomena and new artificial materials. Combining the strengths of reactive molecular-beam epitaxy and pulsed-laser deposition, we show here, with examples of Sr1+x Ti1-x O3+δ, Ruddlesden-Popper phase La n+1Ni n O3n+1 (n = 4), and LaAl1+y O3(1+0.5y)/SrTiO3 interfaces, that atomic layer-by-layer laser molecular-beam epitaxy significantly advances the state of the art in constructing oxide materials with atomic layer precision and control over stoichiometry. With atomic layer-by-layer laser molecular-beam epitaxy we have produced conducting LaAlO3/SrTiO3 interfaces at high oxygen pressures that show no evidence of oxygen vacancies, a capability not accessible by existing techniques. The carrier density of the interfacial two-dimensional electron gas thus obtained agrees quantitatively with the electronic reconstruction mechanism.",
author = "Qingyu Lei and Maryam Golalikhani and Davidson, {Bruce A.} and Guozhen Liu and Schlom, {Darrell G.} and Qiao Qiao and Yimei Zhu and Chandrasena, {Ravini U.} and Weibing Yang and Gray, {Alexander X.} and Elke Arenholz and Farrar, {Andrew K.} and Tenne, {Dmitri A.} and Minhui Hu and Jiandong Guo and Rakesh Singh and Xiaoxing Xi",
note = "Funding Information: The authors thank Dr. S. L. Shi and Dr. F. Q. Huang of Shanghai Institute of Ceramics, Chinese Academy of Sciences for synthesizing the ceramic SrO target which was used when developing the ALL-laser MBE technique. We thank Dr. P. S. Risborough for the helpful discussions concerning the Kondo effect. We thank Dr. Ph. Ghosez for comments on the manuscript and providing us with the first-principles calculation data on the LaAlO3 thickness dependence. This material is based upon work supported by the U.S. Department of Energy, Office of Science, under Grant No. DESC0004764 (Q. Y. L. and X. X. X.). Raman studies at Boise State University have been supported by NSF under Grant No. DMR-1006136 (A.K.F. and D. A. T.) TEM study was supported by CCDM, an EFRC funded by U.S. DOE-BES, under award #DE-SC0012575 (Q.Q.), by DOE-BES, Materials Science and Engineering, under Contract No. DESC0012704 (Y.Z.), and used resources of CFN at BNL, a U.S. DOE Office of Science Facility. A.X.G. acknowledges support from the U.S. Army Research Office, under Grant No. W911NF-15-1-0181. The Advanced Light Source is supported by the Director, Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. Publisher Copyright: {\textcopyright} 2017 The Author(s).",
year = "2017",
month = dec,
day = "1",
doi = "10.1038/s41535-017-0015-x",
language = "English (US)",
volume = "2",
journal = "npj Quantum Materials",
issn = "2397-4648",
publisher = "Nature Publishing Group",
number = "1",
}