Conformally coating vertically aligned carbon nanotube arrays using thermal decomposition of iron pentacarbonyl

Owen Hildreth, Baratunde Cola, Samuel Graham, C. P. Wong

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Conformally coating vertically aligned carbon nanotubes (v-CNT) with metals or oxides can be difficult because standard line-of-sight deposition methods, such as dc sputter coating and electron-beam evaporation, are hindered by the low mean-free-path within the vertically aligned array. In this work, we present a facile method to conformally coat dense arrays of v-CNTs using thermal decomposition of iron pentacarbonyl at 205̊ C and 30 mTorr. The resulting coatings were found to be uniform from top-to-bottom across an entire 1 1 cm2 array of v-CNTs. The thickness of the deposited coating was found to be 2-3 nmcycle and the resulting film thickness were found to be 13 ± 3 nm after five cycles and 55 ± 5 nm after 20 cycles. This process demonstrates that metal organic chemical vapor deposition can be used to fabricate conformal coatings on v-CNTs.

Original languageEnglish (US)
Article number03D101
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume30
Issue number3
DOIs
StatePublished - May 2012

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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