This letter presents results of rapid processing for X-ray absorption correction in quantitative X-ray microanalysis using an analytical electron microscope. A computer-based system developed for analytical electron microscopy is used to assist in the extrapolation method, which does not require thickness measurement but only the recording of characteristic X-rays for absorption correction.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics