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Comprehensive approach to MuGFET metrology
G. F. Lorusso, P. Leray, T. Vandeweyer, M. Ercken, C. Delvaux, I. Pollentier, S. Cheng, N. Collaert, R. Rooyackers, B. Degroote, M. Jurczak, S. Biesemans, O. Richard, H. Bender, A. Azordegan, J. McCormack, S. Shirke, J. Prochazka, T. Long
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
6
Scopus
citations