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Comparison of scanning laser annealing and microwave annealing for As+ implanted Si
Zhao Zhao, Joe Hilman, Manny Oropeza, Qiong Nian, Terry Alford
- Engineering of Matter, Transport and Energy, School for (SEMTE)
- IAFSE-SEMTE: Mechanical and Aerospace Engineering
- Flexible Electronics and Display Center (FEDC)
- IAFSE-SEMTE: Materials Science and Engineering
- IAFSE-SEMTE: Chemical Engineering
- IAFSE-ECEE: Connection One (C1)
- CLAS-NS: Solid State Science, LeRoy Eyring Center for (CSSS)
- Knowledge Enterprise (KE)
Research output: Contribution to journal › Article › peer-review