Comparison of elastic resonance and elastic recoil detection in the quantification of carbon in SiGeC

A. E. Bair, Z. Atzmon, S. W. Russell, J. C. Barbour, Terry Alford, J. W. Mayer

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The carbon concentrations of chemical vapor deposition grown Si1-x-yGexCy (0.25 < x < 0.37 and 0.01 < y0.12) layers on (100) Si with uniform composition profiles were quantified by two ion analysis techniques. Measurements made with backscattering spectrometry using a 4.295 MeV He2+ incident ion were compared to compositions predicted by elastic recoil detection (ERD) using a 24 MeV Si5+ incident ion. To enhance the carbon scattering cross section for the backscattering measurements, the 4.265 MeV 12C(α, α)12C elastic resonance reaction was used. The carbon concentrations of the films were calculated by integrating the resonant scattering cross section using the energy width of the layer as the limits of integration. The results of this backscattering analysis technique were compared to the predicted carbon concentrations obtained by ERD. It was found that the predictions of these techniques correlated within the uncertainty of each method.

Original languageEnglish (US)
Pages (from-to)274-277
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume118
Issue number1-4
StatePublished - Sep 1996

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Backscattering
Carbon
backscattering
carbon
Ions
scattering cross sections
Scattering
ions
Chemical analysis
Spectrometry
Chemical vapor deposition
vapor deposition
profiles
predictions
spectroscopy
energy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Comparison of elastic resonance and elastic recoil detection in the quantification of carbon in SiGeC. / Bair, A. E.; Atzmon, Z.; Russell, S. W.; Barbour, J. C.; Alford, Terry; Mayer, J. W.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 118, No. 1-4, 09.1996, p. 274-277.

Research output: Contribution to journalArticle

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