Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

P. Boher, Ph Houdy, P. Kaikati, R. Barchewitz, L. J. Van Ijzendoorn, Z. G. Li, David Smith, J. C. Joud

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B 4C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJames P. Knauer, Gopal K. Shenoy
PublisherPubl by Int Soc for Optical Engineering
Pages165-179
Number of pages15
Volume1345
StatePublished - 1990
Externally publishedYes
EventAdvanced X-Ray/EUV Radiation Sources and Applications - San Diego, CA, USA
Duration: Jul 11 1990Jul 13 1990

Other

OtherAdvanced X-Ray/EUV Radiation Sources and Applications
CitySan Diego, CA, USA
Period7/11/907/13/90

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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    Boher, P., Houdy, P., Kaikati, P., Barchewitz, R., Van Ijzendoorn, L. J., Li, Z. G., Smith, D., & Joud, J. C. (1990). Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. In J. P. Knauer, & G. K. Shenoy (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1345, pp. 165-179). Publ by Int Soc for Optical Engineering.