Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

P. Boher; Ph Houdy; P. Kaikati; R. Barchewitz; L. J. Van Ijzendoorn; Z. G. Li; David Smith; J. C. Joud

Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

P. Boher, Ph Houdy, P. Kaikati, R. Barchewitz, L. J. Van Ijzendoorn, Z. G. Li, David Smith, J. C. Joud

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B ₄C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	James P. Knauer, Gopal K. Shenoy
Publisher	Publ by Int Soc for Optical Engineering
Pages	165-179
Number of pages	15
Volume	1345
State	Published - 1990
Externally published	Yes
Event	Advanced X-Ray/EUV Radiation Sources and Applications - San Diego, CA, USA Duration: Jul 11 1990 → Jul 13 1990

Other

Other	Advanced X-Ray/EUV Radiation Sources and Applications
City	San Diego, CA, USA
Period	7/11/90 → 7/13/90

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

Access to Document

Fingerprint Dive into the research topics of 'Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors'. Together they form a unique fingerprint.

Cite this

Boher, P., Houdy, P., Kaikati, P., Barchewitz, R., Van Ijzendoorn, L. J., Li, Z. G., Smith, D., & Joud, J. C. (1990). Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. In J. P. Knauer, & G. K. Shenoy (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1345, pp. 165-179). Publ by Int Soc for Optical Engineering.

Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. / Boher, P.; Houdy, Ph; Kaikati, P.; Barchewitz, R.; Van Ijzendoorn, L. J.; Li, Z. G.; Smith, David; Joud, J. C.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / James P. Knauer; Gopal K. Shenoy. Vol. 1345 Publ by Int Soc for Optical Engineering, 1990. p. 165-179.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Boher, P, Houdy, P, Kaikati, P, Barchewitz, R, Van Ijzendoorn, LJ, Li, ZG, Smith, D & Joud, JC 1990, Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. in JP Knauer & GK Shenoy (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 1345, Publ by Int Soc for Optical Engineering, pp. 165-179, Advanced X-Ray/EUV Radiation Sources and Applications, San Diego, CA, USA, 7/11/90.

Boher, P. ; Houdy, Ph ; Kaikati, P. ; Barchewitz, R. ; Van Ijzendoorn, L. J. ; Li, Z. G. ; Smith, David ; Joud, J. C. / Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. Proceedings of SPIE - The International Society for Optical Engineering. editor / James P. Knauer ; Gopal K. Shenoy. Vol. 1345 Publ by Int Soc for Optical Engineering, 1990. pp. 165-179

@inproceedings{97327683f76d438ca7ed4049a4baed93,

title = "Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors",

abstract = "Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B 4C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials. ",

author = "P. Boher and Ph Houdy and P. Kaikati and R. Barchewitz and {Van Ijzendoorn}, {L. J.} and Li, {Z. G.} and David Smith and Joud, {J. C.}",

year = "1990",

language = "English (US)",

volume = "1345",

pages = "165--179",

editor = "Knauer, {James P.} and Shenoy, {Gopal K.}",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "Publ by Int Soc for Optical Engineering",

note = "Advanced X-Ray/EUV Radiation Sources and Applications ; Conference date: 11-07-1990 Through 13-07-1990",

}

TY - GEN

T1 - Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

AU - Boher, P.

AU - Houdy, Ph

AU - Kaikati, P.

AU - Barchewitz, R.

AU - Van Ijzendoorn, L. J.

AU - Li, Z. G.

AU - Smith, David

AU - Joud, J. C.

PY - 1990

Y1 - 1990

N2 - Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B 4C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials.

AB - Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B 4C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials.

UR - http://www.scopus.com/inward/record.url?scp=0025556102&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025556102&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0025556102

VL - 1345

SP - 165

EP - 179

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Knauer, James P.

A2 - Shenoy, Gopal K.

PB - Publ by Int Soc for Optical Engineering

T2 - Advanced X-Ray/EUV Radiation Sources and Applications

Y2 - 11 July 1990 through 13 July 1990

ER -