Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

P. Boher; Ph Houdy; P. Kaikati; R. Barchewitz; L. J. Van Ijzendoorn; Z. G. Li; David Smith; J. C. Joud

Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

P. Boher, Ph Houdy, P. Kaikati, R. Barchewitz, L. J. Van Ijzendoorn, Z. G. Li, David Smith, J. C. Joud

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B ₄C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	James P. Knauer, Gopal K. Shenoy
Publisher	Publ by Int Soc for Optical Engineering
Pages	165-179
Number of pages	15
Volume	1345
State	Published - 1990
Externally published	Yes
Event	Advanced X-Ray/EUV Radiation Sources and Applications - San Diego, CA, USA Duration: Jul 11 1990 → Jul 13 1990

Other

Other	Advanced X-Ray/EUV Radiation Sources and Applications
City	San Diego, CA, USA
Period	7/11/90 → 7/13/90

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

Cite this

Boher, P., Houdy, P., Kaikati, P., Barchewitz, R., Van Ijzendoorn, L. J., Li, Z. G., Smith, D., & Joud, J. C. (1990). Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. In J. P. Knauer, & G. K. Shenoy (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1345, pp. 165-179). Publ by Int Soc for Optical Engineering.

Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. / Boher, P.; Houdy, Ph; Kaikati, P.; Barchewitz, R.; Van Ijzendoorn, L. J.; Li, Z. G.; Smith, David; Joud, J. C.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / James P. Knauer; Gopal K. Shenoy. Vol. 1345 Publ by Int Soc for Optical Engineering, 1990. p. 165-179.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Boher, P, Houdy, P, Kaikati, P, Barchewitz, R, Van Ijzendoorn, LJ, Li, ZG, Smith, D & Joud, JC 1990, Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. in JP Knauer & GK Shenoy (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 1345, Publ by Int Soc for Optical Engineering, pp. 165-179, Advanced X-Ray/EUV Radiation Sources and Applications, San Diego, CA, USA, 7/11/90.

Boher, P. ; Houdy, Ph ; Kaikati, P. ; Barchewitz, R. ; Van Ijzendoorn, L. J. ; Li, Z. G. ; Smith, David ; Joud, J. C. / Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors. Proceedings of SPIE - The International Society for Optical Engineering. editor / James P. Knauer ; Gopal K. Shenoy. Vol. 1345 Publ by Int Soc for Optical Engineering, 1990. pp. 165-179

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abstract = "Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B 4C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials. ",

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AB - Tungsten, iron and rhodium materials have been deposited alternatively with carbon and boron carbide by diode rf-sputtering. Lower interface roughnesses are found in each case using boron carbide instead of carbon, and is related to the greater tendency of boron to diffuse inside the metallic layers. This effect leads to metallic layer densities lower than expected, especially using tungsten and rhodium. The soft X-ray performances are then reduced. Fe/B 4C multilayers have nevertheless exhibit interesting reflecting properties at the boron K- α line. Some other improvement should perhaps be obtained minimizing the surface bombardment (bias on the sample, greater target-sample distance, ...), reducing the sample temperature or with other metallic materials.

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Comparative study of carbon and boron carbide spacing layers inside soft x-ray mirrors

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