Comparative study of bearing designs and operational environments for harmonic side-drive micromotors

Vijayakumar R. Dhuler, Mehran Mehregany, Stephen Phillips

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

This paper reports the development of flange bearing harmonic side-drive (hereafter referred to as wobble) micromotors and the results from a comparative study of the operation of flange and center-pin bearing micromotors in different gaseous environments. Our flange and center-pin wobble polysilicon micromotors have been operated with excitations as low as 30 V across 1.5 μm rotor/stator gaps. Since the flange in the flange bearing design is located at a smaller radius than the bushing in the center-pin bearing design, changes in the frictional parameters of the flange/bushing contact affect the performance of flange bearing micromotors less than that of the center-pin bearing micromotors. As a result, flange bearing wobble micromotors show superior performance in gaseous environments over their center-pin counterparts. They can be operated in room air for longer periods and are not significantly affected by the operating environment or by extended storage between operations. The coefficient of friction, μpp, for polysilicon on polysilicon is observed to change with the operational environment; μpp is 0.38 for operation in nitrogen and argon, 0.48 for operation in oxygen, and 0.54 for operation in room air. A small increase in the flange/bushing normal contact force is observed in room air as compared to nitrogen.

Original languageEnglish (US)
Pages (from-to)1985-1989
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume40
Issue number11
DOIs
StatePublished - Nov 1993
Externally publishedYes

Fingerprint

Bearings (structural)
micromotors
Micromotors
flanges
Flanges
harmonics
bushings
Bushings
Polysilicon
rooms
air
Nitrogen
Air
nitrogen
Argon
stators
Contacts (fluid mechanics)
coefficient of friction
Stators
rotors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Comparative study of bearing designs and operational environments for harmonic side-drive micromotors. / Dhuler, Vijayakumar R.; Mehregany, Mehran; Phillips, Stephen.

In: IEEE Transactions on Electron Devices, Vol. 40, No. 11, 11.1993, p. 1985-1989.

Research output: Contribution to journalArticle

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