Comparative Scanning Probe Microscopy Study of the Surface Morphology of Au Films Grown from the Vapor Onto Glass, Fused Silica, and Muscovite Mica

J. A. DeRose, D. B. Lampner, Stuart Lindsay

Research output: Contribution to journalArticle

36 Scopus citations

Abstract

In a previous paper [J. A. DeRose, T. Thundat, L. A. Nagahara, and S. M. Lindsay, Surf. Sei. 256, 102 (1991)], the conditions which can be used to grow Au films epitaxially on muscovite mica to obtain large area, flat faces are reported. Since then, it has been reported that Au films grown on an amorphous substrate [J. Hwang and M. A. Dubson, J. Appl. Phys. 72, 1852 (1992)] (nonepitaxy) have shown to be at least as smooth as those on mica. In this article, the results from scanning tunneling microscopy analysis of Au films grown on mica, glass cover slips, and fused silica are compared. By comparing the rms surface roughness (z data standard deviation. SD) values for each film type, we find that the mica films show the smoothest surfaces, i.e., smallest rms surface roughness values. We then attempt to explain these results by taking into account the accepted model of film growth from the vapor (physical vapor deposition) and the surface structure of bare mica, glass (optical microscope slide cover slip), and fused silica as shown with atomic force microscopy.

Original languageEnglish (US)
Pages (from-to)776-780
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume11
Issue number4
DOIs
StatePublished - Jul 1993

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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