A commercial parallel electron energy loss spectrometer (PEELS) system has been modified to allow it to record, line by line, two-dimensional energy-filtered electron diffraction patterns or images. The results given for convergent beam electron diffraction patterns in silicon show that the performance of the system is intermediate between that of an imaging energy filter (such as an omega filter) and a serial scanned readout Grigson system.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics