Commercial spectrometer modifications for energy filtering of electron diffraction patterns and images

R. Holmestad, O. L. Krivanek, R. Høier, K. Marthinsen, John Spence

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

A commercial parallel electron energy loss spectrometer (PEELS) system has been modified to allow it to record, line by line, two-dimensional energy-filtered electron diffraction patterns or images. The results given for convergent beam electron diffraction patterns in silicon show that the performance of the system is intermediate between that of an imaging energy filter (such as an omega filter) and a serial scanned readout Grigson system.

Original languageEnglish (US)
Pages (from-to)454-458
Number of pages5
JournalUltramicroscopy
Volume52
Issue number3-4
DOIs
StatePublished - Dec 1993

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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