Cobalt and titanium metallization of SiGeC for shallow contacts

A. E. Bair, Terry Alford, Z. Atzmon, S. D. Marcus, D. C. Doller, R. Morton, S. S. Lau, J. W. Mayer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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Chemical Compounds

Engineering & Materials Science