CMOS compatible RF MEMS switch

Narendra V. Lakamraju, Bruce Kim, Stephen Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsH. Urey, A. El-Fatatry
Pages193-201
Number of pages9
Volume5455
DOIs
StatePublished - 2004
EventMEM, MOEMS, and Micromachining - Strasbourg, France
Duration: Apr 29 2004Apr 30 2004

Other

OtherMEM, MOEMS, and Micromachining
CountryFrance
CityStrasbourg
Period4/29/044/30/04

Keywords

  • CMOS
  • Electrostatic
  • High power
  • MEMS switch
  • RF

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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  • Cite this

    Lakamraju, N. V., Kim, B., & Phillips, S. (2004). CMOS compatible RF MEMS switch. In H. Urey, & A. El-Fatatry (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5455, pp. 193-201) https://doi.org/10.1117/12.544120