CMOS compatible RF MEMS switch

Narendra V. Lakamraju, Bruce Kim, Stephen Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsH. Urey, A. El-Fatatry
Pages193-201
Number of pages9
Volume5455
DOIs
StatePublished - 2004
EventMEM, MOEMS, and Micromachining - Strasbourg, France
Duration: Apr 29 2004Apr 30 2004

Other

OtherMEM, MOEMS, and Micromachining
CountryFrance
CityStrasbourg
Period4/29/044/30/04

Fingerprint

microelectromechanical systems
MEMS
CMOS
switches
Switches
switching circuits
Electric potential
electric potential

Keywords

  • CMOS
  • Electrostatic
  • High power
  • MEMS switch
  • RF

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Lakamraju, N. V., Kim, B., & Phillips, S. (2004). CMOS compatible RF MEMS switch. In H. Urey, & A. El-Fatatry (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5455, pp. 193-201) https://doi.org/10.1117/12.544120

CMOS compatible RF MEMS switch. / Lakamraju, Narendra V.; Kim, Bruce; Phillips, Stephen.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / H. Urey; A. El-Fatatry. Vol. 5455 2004. p. 193-201.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lakamraju, NV, Kim, B & Phillips, S 2004, CMOS compatible RF MEMS switch. in H Urey & A El-Fatatry (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5455, pp. 193-201, MEM, MOEMS, and Micromachining, Strasbourg, France, 4/29/04. https://doi.org/10.1117/12.544120
Lakamraju NV, Kim B, Phillips S. CMOS compatible RF MEMS switch. In Urey H, El-Fatatry A, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5455. 2004. p. 193-201 https://doi.org/10.1117/12.544120
Lakamraju, Narendra V. ; Kim, Bruce ; Phillips, Stephen. / CMOS compatible RF MEMS switch. Proceedings of SPIE - The International Society for Optical Engineering. editor / H. Urey ; A. El-Fatatry. Vol. 5455 2004. pp. 193-201
@inproceedings{7611ea14dc0a4f90a332ad0cbd7fae0b,
title = "CMOS compatible RF MEMS switch",
abstract = "Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.",
keywords = "CMOS, Electrostatic, High power, MEMS switch, RF",
author = "Lakamraju, {Narendra V.} and Bruce Kim and Stephen Phillips",
year = "2004",
doi = "10.1117/12.544120",
language = "English (US)",
volume = "5455",
pages = "193--201",
editor = "H. Urey and A. El-Fatatry",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - CMOS compatible RF MEMS switch

AU - Lakamraju, Narendra V.

AU - Kim, Bruce

AU - Phillips, Stephen

PY - 2004

Y1 - 2004

N2 - Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

AB - Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

KW - CMOS

KW - Electrostatic

KW - High power

KW - MEMS switch

KW - RF

UR - http://www.scopus.com/inward/record.url?scp=8844263927&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=8844263927&partnerID=8YFLogxK

U2 - 10.1117/12.544120

DO - 10.1117/12.544120

M3 - Conference contribution

AN - SCOPUS:8844263927

VL - 5455

SP - 193

EP - 201

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Urey, H.

A2 - El-Fatatry, A.

ER -