CMOS compatible RF MEMS switch

Narendra V. Lakamraju; Bruce Kim; Stephen Phillips

doi:10.1117/12.544120

CMOS compatible RF MEMS switch

Narendra V. Lakamraju, Bruce Kim, Stephen Phillips

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	H. Urey, A. El-Fatatry
Pages	193-201
Number of pages	9
Volume	5455
DOIs	https://doi.org/10.1117/12.544120
State	Published - 2004
Event	MEM, MOEMS, and Micromachining - Strasbourg, France Duration: Apr 29 2004 → Apr 30 2004

Other

Other	MEM, MOEMS, and Micromachining
Country/Territory	France
City	Strasbourg
Period	4/29/04 → 4/30/04

Keywords

CMOS
Electrostatic
High power
MEMS switch
RF

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

Access to Document

10.1117/12.544120

Cite this

@inproceedings{7611ea14dc0a4f90a332ad0cbd7fae0b,

title = "CMOS compatible RF MEMS switch",

abstract = "Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.",

keywords = "CMOS, Electrostatic, High power, MEMS switch, RF",

author = "Lakamraju, {Narendra V.} and Bruce Kim and Stephen Phillips",

year = "2004",

doi = "10.1117/12.544120",

language = "English (US)",

volume = "5455",

pages = "193--201",

editor = "H. Urey and A. El-Fatatry",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

note = "MEM, MOEMS, and Micromachining ; Conference date: 29-04-2004 Through 30-04-2004",

}

TY - GEN

T1 - CMOS compatible RF MEMS switch

AU - Lakamraju, Narendra V.

AU - Kim, Bruce

AU - Phillips, Stephen

PY - 2004

Y1 - 2004

N2 - Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

AB - Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

KW - CMOS

KW - Electrostatic

KW - High power

KW - MEMS switch

KW - RF

UR - http://www.scopus.com/inward/record.url?scp=8844263927&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=8844263927&partnerID=8YFLogxK

U2 - 10.1117/12.544120

DO - 10.1117/12.544120

M3 - Conference contribution

AN - SCOPUS:8844263927

VL - 5455

SP - 193

EP - 201

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Urey, H.

A2 - El-Fatatry, A.

T2 - MEM, MOEMS, and Micromachining

Y2 - 29 April 2004 through 30 April 2004

ER -

CMOS compatible RF MEMS switch

Abstract

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this