Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron

John Kouvetakis, M. W. McElfresh, D. B. Beach

Research output: Contribution to journalArticle

18 Scopus citations

Abstract

Thermal decomposition of triphenyl boron vapor at 800°C produced boron-carbon thin films of composition C16-18B. The room-temperature resistivity of this material was 1.8 × 10-4 Ω· cm, considerably lower than pyrolytic carbons produced at similar temperatures. This resistivity remained unchanged as the temperature was lowered to 5 K, indicating fine-grain, metallic-like conductivity. Material composition was determined using Auger electron spectroscopy. X-ray and electron diffraction studies show that the films had a layered structure similar to turbostatic graphite and ESCA experiments indicate that the boron is bonded to carbon and is not present as a second phase.

Original languageEnglish (US)
Pages (from-to)1129-1132
Number of pages4
JournalCarbon
Volume32
Issue number6
DOIs
StatePublished - 1994

Keywords

  • CVD
  • Graphite
  • boron-doped graphite
  • triphenyl boron

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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