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Chemical vapor deposition of heteroepitaxial Si1-x-yGe xCy films on (100)Si substrates
Z. Atzmon, A. E. Bair, E. J. Jaquez, J. W. Mayer, D. Chandrasekhar, David Smith, Richard Hervig, McD Robinson
Research output: Contribution to journal › Article › peer-review
75
Scopus
citations