TY - JOUR
T1 - Chemical aspects of Pb-Zr-Ti oxide thin film syntheses by pe-mocvd below 500-c
AU - Petuskey, William
AU - Richardson, David A.
AU - Dey, Sandwip
N1 - Funding Information:
ACKNOWLED GEMENTS The authors would like to thank A.M. Yates, R.A. Nieman, and C.K. Barlingay for their assistance with x-ray, NMR, and electrical characterization. W.T. Petuskey gratefully acknowledges an internal grant from Arizona State University in providing the start-up funds for constructing the PE-MOCVD reactor.
PY - 1992/11
Y1 - 1992/11
N2 - The general features of the chemistry in synthesizing lead zirconium titanate thin films by PE-MOCVD are discussed based on a preliminary experimental investigation. A qualitative model was constructed as a guide for optimizing the formation of the perovskite phase in the as-deposited condition. This was based on concepts of crystal chemistry of the perovskite and pyrochlore structures and the observed deposition kinetics. Currently, thin films containing up to 92 vol % perovskite have been formed below 500-C in the as-deposited condition. Sufficient latitude remains in adjusting the operating parameters that the formation of phase pure perovskite is considered possible. A thermodynamic analysis of the solid state suggests that low temperature thermal equilibration will yield minority lead-rich phases. Consequently, nonequilibrium processing techniques such as plasma processing are considered necessary. Ferroelectric hysteresis was observed for films receiving post deposition anneals.
AB - The general features of the chemistry in synthesizing lead zirconium titanate thin films by PE-MOCVD are discussed based on a preliminary experimental investigation. A qualitative model was constructed as a guide for optimizing the formation of the perovskite phase in the as-deposited condition. This was based on concepts of crystal chemistry of the perovskite and pyrochlore structures and the observed deposition kinetics. Currently, thin films containing up to 92 vol % perovskite have been formed below 500-C in the as-deposited condition. Sufficient latitude remains in adjusting the operating parameters that the formation of phase pure perovskite is considered possible. A thermodynamic analysis of the solid state suggests that low temperature thermal equilibration will yield minority lead-rich phases. Consequently, nonequilibrium processing techniques such as plasma processing are considered necessary. Ferroelectric hysteresis was observed for films receiving post deposition anneals.
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U2 - 10.1080/10584589208215749
DO - 10.1080/10584589208215749
M3 - Article
AN - SCOPUS:84972857467
SN - 1058-4587
VL - 2
SP - 269
EP - 295
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
IS - 1-4
ER -