Chemical aspects of Pb-Zr-Ti oxide thin film syntheses by pe-mocvd below 500-c

William Petuskey, David A. Richardson, Sandwip Dey

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

The general features of the chemistry in synthesizing lead zirconium titanate thin films by PE-MOCVD are discussed based on a preliminary experimental investigation. A qualitative model was constructed as a guide for optimizing the formation of the perovskite phase in the as-deposited condition. This was based on concepts of crystal chemistry of the perovskite and pyrochlore structures and the observed deposition kinetics. Currently, thin films containing up to 92 vol % perovskite have been formed below 500-C in the as-deposited condition. Sufficient latitude remains in adjusting the operating parameters that the formation of phase pure perovskite is considered possible. A thermodynamic analysis of the solid state suggests that low temperature thermal equilibration will yield minority lead-rich phases. Consequently, nonequilibrium processing techniques such as plasma processing are considered necessary. Ferroelectric hysteresis was observed for films receiving post deposition anneals.

Original languageEnglish (US)
Pages (from-to)269-295
Number of pages27
JournalIntegrated Ferroelectrics
Volume2
Issue number1-4
DOIs
StatePublished - 1992

Fingerprint

Perovskite
Oxide films
chemistry
Thin films
oxides
minorities
synthesis
thin films
metalorganic chemical vapor deposition
Lead
adjusting
hysteresis
Crystal chemistry
solid state
Plasma applications
thermodynamics
kinetics
Metallorganic chemical vapor deposition
Zirconium
Ferroelectric materials

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Materials Chemistry
  • Electronic, Optical and Magnetic Materials

Cite this

Chemical aspects of Pb-Zr-Ti oxide thin film syntheses by pe-mocvd below 500-c. / Petuskey, William; Richardson, David A.; Dey, Sandwip.

In: Integrated Ferroelectrics, Vol. 2, No. 1-4, 1992, p. 269-295.

Research output: Contribution to journalArticle

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