TY - JOUR
T1 - Characterization ofWC/B4C multilayers sputtered in argoWmethane atmospheres
AU - Diehl, Patrick E.
AU - Lund, Mark W.
AU - Madsenx, David W.
AU - McIntyre, Larry C.
AU - Smith, David J.
N1 - Funding Information:
6. ACKNOWLEDGEMENTS P.D. was supported by the Department of Energy grant No. DE-FGO3-90ER80953. The authors would like to thank J. Clark for obtaining the electron microprobe data, Dr. A. Yates and Dr. T.Groy for their help with the x-ray data acquisition and running of the SAMPDIS program, and Dr. M. George for acquisition of the XPS data. The x-ray data were obtained on equipment purchased under National Science Foundation grant No. DMR-8406823. The electron microprobe was purchased with aid of the National Science Foundation grant No. EAR-8408163. All the TEMIHREM was performed at the Center for High Resolution Electron Microscopy at Arizona State University, established with support from the National Science Foundation (grant No. DMR-89-13384).
Publisher Copyright:
© 1993 SPIE. All rights reserved.
PY - 1993/1/21
Y1 - 1993/1/21
N2 - A series of six WC,JB4C multilayers was produced by d.c. magnetron sputtering in an atmosphere of argon with methane additions (from 0 to 15%). The microstructure and chemistry of these multilayers was studied using Transmission/High Resolution Electron Microscopy, X-ray Diffraction, X-ray Photoelectron Spectroscopy, Electron Probe Microanalysis and Ion Beam Analysis with MeV helium beams. The multilayers were shown to be completely amorphous. In addition to carbon incorporation, a significant amount of hydrogen was incorporated. The amounts of hydrogen and carbon present increased with the percentage of methane (up to the 12% sample), but the atom percent of argon in the multilayers was constant, regardless of the methane concentration. It was found that reflecövity values for Mg K-A radiation improved as the methane concentration increased, with the sample produced in a 12% methane atmosphere showing the highest reflectivity. Annealing of a representative sample caused a significant loss of hydrogen, and a decrease of the bilayer spacing.
AB - A series of six WC,JB4C multilayers was produced by d.c. magnetron sputtering in an atmosphere of argon with methane additions (from 0 to 15%). The microstructure and chemistry of these multilayers was studied using Transmission/High Resolution Electron Microscopy, X-ray Diffraction, X-ray Photoelectron Spectroscopy, Electron Probe Microanalysis and Ion Beam Analysis with MeV helium beams. The multilayers were shown to be completely amorphous. In addition to carbon incorporation, a significant amount of hydrogen was incorporated. The amounts of hydrogen and carbon present increased with the percentage of methane (up to the 12% sample), but the atom percent of argon in the multilayers was constant, regardless of the methane concentration. It was found that reflecövity values for Mg K-A radiation improved as the methane concentration increased, with the sample produced in a 12% methane atmosphere showing the highest reflectivity. Annealing of a representative sample caused a significant loss of hydrogen, and a decrease of the bilayer spacing.
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U2 - 10.1117/12.140571
DO - 10.1117/12.140571
M3 - Conference article
AN - SCOPUS:84913985794
SN - 0277-786X
VL - 1742
SP - 354
EP - 364
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography 1992
Y2 - 22 July 1992
ER -