Characterization and comparison of three microfabrication methods to generate out-of-plane microvortices for single cell rotation and 3D imaging

This paper presents three different microfabrication technologies for manufacturing out-of-plane, flat-bottomed, undercut trapezoidal structures for generating a fluidic microscale vortex (microvortex). The first method is based on anisotropic silicon etching and a 'sandwich' UV polymer casting assembly; the second method uses a backside diffuser photolithography technique; and the third method features a tilted backside photolithography technique. We discuss the advantages, limitations, and utility of each technique. We further demonstrate that the microvortex generated in the resultant undercut trapezoidal structures can be used to rotate biological microparticles, e.g. single, live cells for multiperspective, high resolution 3D imaging using computed tomography, and angularly resolved confocal imaging.