Characterization and comparison of three microfabrication methods to generate out-of-plane microvortices for single cell rotation and 3D imaging

Rishabh M. Shetty, Jakrey R. Myers, Manoj Sreenivasulu, Wacey Teller, Juan Vela, Jeff Houkal, Shih-Hui Chao, Roger H. Johnson, Laimonas Kelbauskas, Hong Wang, Deirdre Meldrum

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This paper presents three different microfabrication technologies for manufacturing out-of-plane, flat-bottomed, undercut trapezoidal structures for generating a fluidic microscale vortex (microvortex). The first method is based on anisotropic silicon etching and a 'sandwich' UV polymer casting assembly; the second method uses a backside diffuser photolithography technique; and the third method features a tilted backside photolithography technique. We discuss the advantages, limitations, and utility of each technique. We further demonstrate that the microvortex generated in the resultant undercut trapezoidal structures can be used to rotate biological microparticles, e.g. single, live cells for multiperspective, high resolution 3D imaging using computed tomography, and angularly resolved confocal imaging.

Original languageEnglish (US)
Article number015004
JournalJournal of Micromechanics and Microengineering
Volume27
Issue number1
DOIs
StatePublished - Jan 1 2017

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Microfabrication
Photolithography
Vortex flow
Imaging techniques
Fluidics
Silicon
Tomography
Etching
Polymers
Casting

Keywords

  • 3D imaging
  • anisotropic etching
  • backside diffuser photolithography
  • backside tilted photolithography
  • microvortex
  • single cell
  • trapezoid

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Characterization and comparison of three microfabrication methods to generate out-of-plane microvortices for single cell rotation and 3D imaging. / Shetty, Rishabh M.; Myers, Jakrey R.; Sreenivasulu, Manoj; Teller, Wacey; Vela, Juan; Houkal, Jeff; Chao, Shih-Hui; Johnson, Roger H.; Kelbauskas, Laimonas; Wang, Hong; Meldrum, Deirdre.

In: Journal of Micromechanics and Microengineering, Vol. 27, No. 1, 015004, 01.01.2017.

Research output: Contribution to journalArticle

Shetty, Rishabh M. ; Myers, Jakrey R. ; Sreenivasulu, Manoj ; Teller, Wacey ; Vela, Juan ; Houkal, Jeff ; Chao, Shih-Hui ; Johnson, Roger H. ; Kelbauskas, Laimonas ; Wang, Hong ; Meldrum, Deirdre. / Characterization and comparison of three microfabrication methods to generate out-of-plane microvortices for single cell rotation and 3D imaging. In: Journal of Micromechanics and Microengineering. 2017 ; Vol. 27, No. 1.
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