Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy

Angus I. Kirkland, Peter D. Nellist, Lan Yun Chang, Sarah J. Haigh

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Scopus citations

Abstract

The review and comparison of the operation of aberration corrected instruments in the CTEM and STEM configurations is discussed. Electron optical correctors provide significant control over many other aberrations and introduce certain higher-order aberrations along with correction of the spherical aberration. The image aberration is defined as the differential of the wave aberration function, which is calculated as the distance between the aberrated and ideal wave surfaces in the diffraction plane. The influence of lens aberrations in CTEM image formation can be described by multiplying the electron wave in reciprocal space. Aberration measurement methods for STEM also include to tilt the illuminating beam through the corrector while using a relatively small beam-limiting aperture such that different illumination angles are explored.

Original languageEnglish (US)
Title of host publicationAdvances in IMAGING AND ELECTRON PHYSICS Aberration-Corrected Electron Microscopy
PublisherAcademic Press Inc
Pages283-325
Number of pages43
ISBN (Print)9780123742209
DOIs
StatePublished - Jan 1 2008
Externally publishedYes

Publication series

NameAdvances in Imaging and Electron Physics
Volume153
ISSN (Print)1076-5670

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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    Kirkland, A. I., Nellist, P. D., Chang, L. Y., & Haigh, S. J. (2008). Chapter 8 Aberration-Corrected Imaging in Conventional Transmission Electron Microscopy and Scanning Transmission Electron Microscopy. In Advances in IMAGING AND ELECTRON PHYSICS Aberration-Corrected Electron Microscopy (pp. 283-325). (Advances in Imaging and Electron Physics; Vol. 153). Academic Press Inc. https://doi.org/10.1016/S1076-5670(08)01008-2