Fingerprint
Dive into the research topics of 'Challenges in atomic layer etching of gallium nitride using surface oxidation and ligand-exchange'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Challenges in atomic layer etching of gallium nitride using surface oxidation and ligand-exchange
Daniel C. Messina, Kevin A. Hatch, Saurabh Vishwakarma, David J. Smith, Yuji Zhao, Robert J. Nemanich
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations