Catalyzed HF Vapor Etching of Silicon Dioxide for Micro- and Nanolithographic Masks

Engineering & Materials Science

• Scanning tunneling microscopy 100%
• Electron beams 83%
• Etching 75%
• Silica 72%
• Masks 66%
• Vapors 62%
• Oxides 24%
• Electron beam lithography 21%
• Reactive ion etching 19%
• Linewidth 17%
• Hydrocarbons 12%
• Silicon 11%
• Experiments 5%

Physics & Astronomy

• masks 59%
• silicon dioxide 53%
• etching 53%
• vapors 52%
• electron beams 50%
• scanning tunneling microscopy 45%
• oxides 14%
• selectivity 11%
• hydrocarbons 11%
• lithography 9%
• silicon 6%
• ions 5%

Chemical Compounds

• Silicon Dioxide 85%
• Electron Beam 76%
• Etching 63%
• Scanning Tunneling Microscopy 35%
• Oxide 12%
• Tunneling 11%
• Hydrocarbon 8%
• Ion 4%
• Surface 3%